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eylius Kleinknecht [2 articles]

Senaste artiklarna i eylius bibliotek av författaren Kleinknecht. Du kan också see andras Kleinknecht.
  • Linewidth measurement on IC masks and wafers by grating test patterns
    Appl. Opt., Vol. 19, No. 4. (15 February 1980), 525.
    posted to scatterometry by eyliu on 2008-05-26 21:25:19 as **
  • Linewidth measurements on IC masks and wafers by grating test patterns
    Applied Optics, Vol. 19, No. 4. (1980), pp. 525-533.
    posted to gratings metrology by eyliu on 2006-03-07 20:11:28 as ***
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